Enhanced growth rates of N-type phosphorus-doped polycrystalline diamond via in-liquid microwave plasma CVD
| Autor: | Tominaga, Yusuke, Uchida, Akihiro, Hunge, Yuvaraj M., Shitanda, Isao, Itagaki, Masayuki, Kondo, Takeshi, Yuasa, Makoto, Uestuska, Hiroshi, Terashima, Chiaki |
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| Zdroj: | In Solid State Sciences September 2024 155 |
| Databáze: | ScienceDirect |
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