The formation of an oscillating system during the sputtering of sapphire single crystal with pulsed glow discharge
| Autor: | Gubal, Anna, Ganeev, Alexander, Solovyev, Nikolay, Gubal, Nikita, Korotetski, Boris, Bodnar, Victoria, Nemets, Valeriy |
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| Zdroj: | In Solid State Sciences September 2018 83:49-55 |
| Databáze: | ScienceDirect |
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