Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films
| Autor: | Jacq, S., Le Paven, C., Le Gendre, L., Benzerga, R., Cheviré, F., Tessier, F., Sharaiha, A. |
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| Zdroj: | In Solid State Sciences April 2016 54:22-29 |
| Databáze: | ScienceDirect |
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