More-energetic vapors of in situ plasmon-activated water as an environmentally friendly etchant
| Autor: | Kao, Wei-Yu, Yu, Shih-Hao, Mai, Fu-Der, Tsai, Hui-Yen, Chen, Jing-Wei, Liu, Yu-Chuan |
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| Zdroj: | In Journal of Industrial and Engineering Chemistry 25 December 2024 140:215-224 |
| Databáze: | ScienceDirect |
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