Artifact-free sample preparation of metal thin films using Xe plasma-focused ion beam milling for atomic resolution and in situ biasing analyses

Autor: Lee, Hee-Beom, Kim, Seon Je, Jung, Min-Hyoung, Kim, Young-Hoon, Kim, Su Jae, Gao, Hai-Feng, Van Leer, Brandon, Jeong, Se-Young, Jeong, Hu Young, Kim, Young-Min
Zdroj: In Materials Characterization October 2024 216
Databáze: ScienceDirect