Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
| Autor: | Abel, Johann J., Apell, Jonathan, Wiesner, Felix, Reinhard, Julius, Wünsche, Martin, Felde, Nadja, Schmidl, Gabriele, Plentz, Jonathan, Paulus, Gerhard G., Lippmann, Stephanie, Fuchs, Silvio |
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| Zdroj: | In Materials Characterization May 2024 211 |
| Databáze: | ScienceDirect |
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