Metal Imaging on Surface of Micro- and Nanoelectronic Devices by Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Possibility to Measure at Nanometer Range
| Autor: | Zoriy, Myroslav V., Mayer, Dirk, Becker, J. Sabine |
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| Zdroj: | In Journal of the American Society for Mass Spectrometry 2009 20(5):883-890 |
| Databáze: | ScienceDirect |
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