Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC
| Autor: | Li, Yuhang, Zhang, Zhe, Song, Qi, Shi, Haiyan, Hou, Yu, Yue, Song, Wang, Ran, Cai, Shunshuo, Zhang, Zichen |
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| Zdroj: | In Journal of Materials Science & Technology 10 June 2024 184:235-244 |
| Databáze: | ScienceDirect |
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