Tuning optical properties of ITO films grown by rf sputtering: Effects of oblique angle deposition and thermal annealing

Autor: DAZA, L.G., ACOSTA, M., CASTRO-RODRÍGUEZ, R., IRIBARREN, A. *
Zdroj: In Transactions of Nonferrous Metals Society of China December 2019 29(12):2566-2576
Databáze: ScienceDirect