Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD
| Autor: | XU, Feng, ZUO, Dun-wen, LU, Wen-zhuang, ZHU, Yong-wei, WANG, Min |
|---|---|
| Zdroj: | In Transactions of Nonferrous Metals Society of China 2009 19 Supplement 3:s722-s726 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect