Time-resolved in-situ investigation of Co-nitride thin film growth by grazing incidence X-ray absorption spectroscopy
Autor: | Braun, F., Eckelt, F., Voss, L., Rothweiler, P., Lützenkirchen-Hecht, D. |
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Zdroj: | In Radiation Physics and Chemistry March 2023 204 |
Databáze: | ScienceDirect |
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