Time-resolved in-situ investigation of Co-nitride thin film growth by grazing incidence X-ray absorption spectroscopy

Autor: Braun, F., Eckelt, F., Voss, L., Rothweiler, P., Lützenkirchen-Hecht, D.
Zdroj: In Radiation Physics and Chemistry March 2023 204
Databáze: ScienceDirect