Surface morphology created by nanosecond laser annealing of amorphised Si layer—Investigations by complementary methods

Autor: Klinger, D., łusakowska, E., Kret, S., Kozankiewicz, B., Żymierska, D.
Zdroj: In Radiation Physics and Chemistry 2011 80(10):1031-1035
Databáze: ScienceDirect