A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining
| Autor: | De Felicis, Daniele, Mughal, Muhammad Zeeshan, Bemporad, Edoardo |
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| Zdroj: | In Micron October 2017 101:8-15 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect