Wavelet analysis based deconvolution to improve the resolution of scanning acoustic microscope images for the inspection of thin die layer in semiconductor

Autor: Jhang, Kyungyoung , Jang, Hyoseong, Park, Byungil, Ha, Job, Park, Ikkeun, Kim, Kyungsuk
Zdroj: In NDT and E International 2002 35(8):549-557
Databáze: ScienceDirect