Wavelet analysis based deconvolution to improve the resolution of scanning acoustic microscope images for the inspection of thin die layer in semiconductor
Autor: | Jhang, Kyungyoung ∗, Jang, Hyoseong, Park, Byungil, Ha, Job, Park, Ikkeun, Kim, Kyungsuk |
---|---|
Zdroj: | In NDT and E International 2002 35(8):549-557 |
Databáze: | ScienceDirect |
Externí odkaz: |