Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage
| Autor: | Mae, Masahiro, Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Hara, Atsushi |
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| Zdroj: | In Mechatronics May 2022 83 |
| Databáze: | ScienceDirect |
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