Exploiting additional actuators and sensors for nano-positioning robust motion control
| Autor: | van Herpen, Robbert, Oomen, Tom, Kikken, Edward, van de Wal, Marc, Aangenent, Wouter, Steinbuch, Maarten |
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| Zdroj: | In Mechatronics September 2014 24(6):619-631 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect