Control of nanopositioning and nanomeasuring machines with a modular FPGA based data processing system
| Autor: | Zschäck, Stephan, Klöckner, Johannes, Gushchina, Irina, Amthor, Arvid, Ament, Christoph, Fengler, Wolfgang |
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| Zdroj: | In Mechatronics April 2013 23(3):257-263 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect