A new process for minimizing residual silicon and carbon of reaction-bonded silicon carbide via chemical vapor deposition

Autor: Lee, Jisu, Kim, Daejong *, Shin, Dongwook, Lee, Hyeon-Geun, Park, Ji Yeon, Kim, Weon-Ju
Zdroj: In Journal of the European Ceramic Society July 2021 41(7):4000-4005
Databáze: ScienceDirect