Synthesis of α-silicon nitride powder by gas-phase ammonolysis of CH 3SiCl 3

Autor: Ziegenbalg, Gerald *, Breuel, Ulrich, Ebrecht, Eila, Holldorf, Horst, Brink, Reinhold
Zdroj: In Journal of the European Ceramic Society 2001 21(7):947-958
Databáze: ScienceDirect