Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches
| Autor: | Alexeenko, Alina, Chigullapalli, Sruti, Zeng, Juan, Guo, Xiaohui, Kovacs, Andrew, Peroulis, Dimitrios |
|---|---|
| Zdroj: | In Reliability Engineering and System Safety 2011 96(9):1171-1183 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect