Optical and structural studies of silicon-enriched films obtained by dc-magnetron co-sputtering

Autor: Aguilar-Hernández, J.R., Monroy-Rodríguez, G., Cárdenas-García, M., Contreras-Puente, G.S.
Zdroj: In Materials Science & Engineering C September 2007 27(5-8):1074-1077
Databáze: ScienceDirect