Optical and structural studies of silicon-enriched films obtained by dc-magnetron co-sputtering
Autor: | Aguilar-Hernández, J.R., Monroy-Rodríguez, G., Cárdenas-García, M., Contreras-Puente, G.S. |
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Zdroj: | In Materials Science & Engineering C September 2007 27(5-8):1074-1077 |
Databáze: | ScienceDirect |
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