Organometallic vapor phase epitaxy (OMVPE)

Autor: Breiland, William G. *, Coltrin, Michael E., Creighton, J.Randall, Hou, Hong Q., Moffat, Harry K., Tsao, Jeffrey Y.
Zdroj: In Materials Science & Engineering R 1999 24(6):241-274
Databáze: ScienceDirect