Controllable synthesis of core-shell SiO2@CeO2 abrasives for chemical mechanical polishing on SiO2 film
| Autor: | Wang, Li, Ren, Gaoyuan, Xie, Wenxiang, Zhang, Jingwei, Pan, Deng, Su, Hongjiu, Wang, Shudong |
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| Zdroj: | In Colloids and Surfaces A: Physicochemical and Engineering Aspects 5 February 2024 682 |
| Databáze: | ScienceDirect |
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