Tailoring the mechanical properties of SiOxHyCz films deposited by atmospheric pressure microwave plasma torch with a Rechtschaffner design of experiments: A pragmatic statistical approach
| Autor: | Landreau, Xavier, Chagnon, Pierre, Dublanche-Tixier, Christelle, Jaoul, Cédric, Tristant, Pascal |
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| Zdroj: | In Computational Materials Science July 2012 60:32-43 |
| Databáze: | ScienceDirect |
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