Growth of three-dimensional SiC clusters on Si modelled by KMC

Autor: Schmidt, A.A., Kharlamov, V.S., Safonov, K.L., Trushin, Yu.V., Zhurkin, E.E., Cimalla, V., Ambacher, O., Pezoldt, J.
Zdroj: In Computational Materials Science 2005 33(1):375-381
Databáze: ScienceDirect