Single-chamber processes for a-Si:H solar cell deposition

Autor: Merdzhanova, T., Woerdenweber, J., Zimmermann, T., Zastrow, U., Flikweert, A.J., Stiebig, H., Beyer, W., Gordijn, A.
Zdroj: In Solar Energy Materials and Solar Cells March 2012 98:146-153
Databáze: ScienceDirect