The potential of sonicated water in the cleaning processes of silicon wafers

Autor: Podolian, A., Nadtochiy, A., Kuryliuk, V., Korotchenkov, O., Schmid, J., Drapalik, M., Schlosser, V.
Zdroj: In Solar Energy Materials and Solar Cells 2011 95(2):765-772
Databáze: ScienceDirect