Study of an argon–hydrogen RF inductive thermal plasma torch used for silicon deposition by optical emission spectroscopy
| Autor: | Bourg, F *, Pellerin, S, Morvan, D, Amouroux, J, Chapelle, J |
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| Zdroj: | In Solar Energy Materials and Solar Cells 2002 72(1):361-371 |
| Databáze: | ScienceDirect |
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