Dielectric properties of RF plasma-deposited a-C:H and a-C:H:N films
| Autor: | Romanko, L.A, Gontar, A.G *, Kutsay, A.M, Khandozko, S.I, Gorokhov, V.Yu |
|---|---|
| Zdroj: | In Diamond & Related Materials April-May 2000 9(3-6):801-804 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect