The influence of ion beam assisted deposition parameters on the properties of boron nitride thin films
| Autor: | Döring, J.-E *, Guangnan, L, Stock, H.-R |
|---|---|
| Zdroj: | In Diamond & Related Materials 1999 8(8):1697-1702 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Döring, J.-E *, Guangnan, L, Stock, H.-R |
|---|---|
| Zdroj: | In Diamond & Related Materials 1999 8(8):1697-1702 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect