Instantaneous annealing of CVD diamond during high dose-rate ion implantation

Autor: Kalish, R a, Uzan-Saguy, C a, *, Ran, B a, Ferber, H b, Guettler, H b, Zachai, R b
Zdroj: In Diamond & Related Materials 1999 8(2):877-881
Databáze: ScienceDirect