Confocal micro-Raman scattering and Rutherford backscattering characterization of lattice damage in aluminum implanted 6H–SiC
| Autor: | Campos, F.J a, Mestres, N b, *, Alsina, F a, Pascual, J a, Morvan, E c, Godignon, P c, Millán, J c |
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| Zdroj: | In Diamond & Related Materials 1999 8(2):357-360 |
| Databáze: | ScienceDirect |
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