Growth of homoepitaxial single crystal diamond by microwave plasma CVD in H2-CH4-O2 gas mixtures at high microwave power densities

Autor: Bolshakov, A.P., Yurov, V.Yu., Fedorova, I.A., Martyanov, A.K., Fedotov, P.V., Popovich, A.F., Ralchenko, V.G., Dai, B.
Zdroj: In Diamond & Related Materials December 2024 150
Databáze: ScienceDirect