Growth of homoepitaxial single crystal diamond by microwave plasma CVD in H2-CH4-O2 gas mixtures at high microwave power densities
Autor: | Bolshakov, A.P., Yurov, V.Yu., Fedorova, I.A., Martyanov, A.K., Fedotov, P.V., Popovich, A.F., Ralchenko, V.G., Dai, B. |
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Zdroj: | In Diamond & Related Materials December 2024 150 |
Databáze: | ScienceDirect |
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