Chemical-mechanical synergetic effect of single crystal SiC polishing using Fe3O4@MIL-100(Fe) magnetic photo-Fenton catalyst

Autor: Ran, Bo, Pan, Jisheng, Yan, Qiusheng, Wu, Qiyuan, Zhuang, Rongji, Zhou, Yongze, Zhao, Ziqi, Zhang, Xiaowei
Zdroj: In Diamond & Related Materials November 2024 149
Databáze: ScienceDirect