Chemical-mechanical synergetic effect of single crystal SiC polishing using Fe3O4@MIL-100(Fe) magnetic photo-Fenton catalyst
Autor: | Ran, Bo, Pan, Jisheng, Yan, Qiusheng, Wu, Qiyuan, Zhuang, Rongji, Zhou, Yongze, Zhao, Ziqi, Zhang, Xiaowei |
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Zdroj: | In Diamond & Related Materials November 2024 149 |
Databáze: | ScienceDirect |
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