Effects of post-deposition annealing on structure and mechanical properties of multilayer Ti/DLC films

Autor: Song, Zicheng, Liu, Yiming, Jiang, Shangzhe, Jiang, Xiaohong, Piliptsou, D.G., Rogachev, A.V.
Zdroj: In Diamond & Related Materials August 2024 147
Databáze: ScienceDirect