Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition
| Autor: | Kelarová, Štĕpánka, Václavik, Richard, Přibyl, Roman, Stupavská, Monika, Buršíková, Vilma |
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| Zdroj: | In Diamond & Related Materials August 2024 147 |
| Databáze: | ScienceDirect |
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