Deposition of uniform diamond films on three dimensional Si spheres by using faraday cage in MPCVD reactor
| Autor: | Yang, Zhiliang, Liu, Yuchen, Guo, Zhijian, Wei, Junjun, Liu, Jinlong, Chen, Liangxian, Li, Chengming |
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| Zdroj: | In Diamond & Related Materials February 2024 142 |
| Databáze: | ScienceDirect |
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