Tribology dependence on both structures of bulk a-C:H:Si films and transfer layer via adjustable Si content

Autor: Wang, Junyan, Xing, Zhaoyang, Gao, Kaixiong, Yang, Panfeng, Xu, Chunlin, Wang, Xin, Lin, Zeng
Zdroj: In Diamond & Related Materials October 2023 138
Databáze: ScienceDirect