High-threshold-voltage and low-leakage-current of normally-off H-diamond FET with self-aligned Zr/ZrO2 gate

Autor: Wang, Fei, Chen, G.Q., Wang, Wei, Zhang, M.H., He, Shi, Shao, Guoqing, Wang, Y.F., Hu, Wenbo, Wang, Hongxing
Zdroj: In Diamond & Related Materials April 2023 134
Databáze: ScienceDirect