Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure
| Autor: | Xie, Bowei, Ding, Fazhu, Shang, Hongjing, Huang, Daxing, Zou, Qi, Li, Congmeng, Gu, Hongwei |
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| Zdroj: | In Diamond & Related Materials April 2023 134 |
| Databáze: | ScienceDirect |
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