Annealing effects on the properties of hydrogenated diamond-like carbon films doped with silicon and nitrogen
| Autor: | Nakazawa, Hideki, Nakamura, Kazuki, Osanai, Hiroya, Sasaki, Yuya, Koriyama, Haruto, Kobayashi, Yasuyuki, Enta, Yoshiharu, Suzuki, Yushi, Suemitsu, Maki |
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| Zdroj: | In Diamond & Related Materials February 2022 122 |
| Databáze: | ScienceDirect |
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