Stress relaxation of three dimensional textured AlN films on sapphire substrate by rapid thermal annealing
| Autor: | Chen, Yanpu, Zhu, Zishu, Zhou, Haolei, Ma, Pingping, Lou, Liren, Zhu, Wei, Wang, Guanzhong |
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| Zdroj: | In Diamond & Related Materials October 2021 118 |
| Databáze: | ScienceDirect |
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