Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations
| Autor: | Sedov, V.S., Martyanov, A.K., Khomich, A.A., Savin, S.S., Zavedeev, E.V., Ralchenko, V.G. |
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| Zdroj: | In Diamond & Related Materials November 2020 109 |
| Databáze: | ScienceDirect |
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