Enhanced deposition rate of polycrystalline CVD diamond at high microwave power densities
| Autor: | Bolshakov, A.P., Ralchenko, V.G., Yurov, V.Y., Shu, G., Bushuev, E.V., Khomich, A.A., Ashkinazi, E.E., Sovyk, D.N., Antonova, I.A., Savin, S.S., Voronov, V.V., Shevchenko, M.Y., Dai, B., Zhu, J. |
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| Zdroj: | In Diamond & Related Materials August 2019 97 |
| Databáze: | ScienceDirect |
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