Implementation of smooth nanocrystalline diamond microstructures by combining reactive ion etching and ion beam etching
| Autor: | Schmitt, Jana a, c, ⁎, Nelissen, Wim b, Wallrabe, Ulrike c, Völklein, Friedemann a |
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| Zdroj: | In Diamond & Related Materials October 2017 79:164-172 |
| Databáze: | ScienceDirect |
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