Deposition of diamond-like carbon thin films by the high power impulse magnetron sputtering method
Autor: | Wiatrowski, A., Kijaszek, W., Posadowski, W.M., Oleszkiewicz, W., Jadczak, J., Kunicki, P. |
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Zdroj: | In Diamond & Related Materials February 2017 72:71-76 |
Databáze: | ScienceDirect |
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