Deposition of diamond-like carbon thin films by the high power impulse magnetron sputtering method

Autor: Wiatrowski, A., Kijaszek, W., Posadowski, W.M., Oleszkiewicz, W., Jadczak, J., Kunicki, P.
Zdroj: In Diamond & Related Materials February 2017 72:71-76
Databáze: ScienceDirect