Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition
| Autor: | Taylor, Andrew, Drahokoupil, Jan, Fekete, Ladislav, Klimša, Ladislav, Kopeček, Jaromír, Purkrt, Adam, Remeš, Zdeněk, Čtvrtlík, Radim, Tomáštík, Jan, Frank, Otakar, Janíček, Petr, Mistrík, Jan, Mortet, Vincent |
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| Zdroj: | In Diamond & Related Materials October 2016 69:13-18 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect