Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices
| Autor: | Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., van Spengen, W. Merlijn |
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| Zdroj: | In Diamond & Related Materials May 2015 55:22-31 |
| Databáze: | ScienceDirect |
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