Hyperthermal atomic oxygen beam irradiation effect on the Ti-containing DLC film

Autor: Kanda, Kazuhiro, Fukuda, Kazuhiro, Kidena, Kengo, Imai, Ryo, Niibe, Masahito, Fujimoto, Synya, Yokota, Kumiko, Tagawa, Masahito
Zdroj: In Diamond & Related Materials January 2014 41:49-52
Databáze: ScienceDirect