X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching
| Autor: | Harigai, Toru, Yasuoka, Yuki, Nitta, Noriko, Furuta, Hiroshi, Hatta, Akimitsu |
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| Zdroj: | In Diamond & Related Materials September 2013 38:36-40 |
| Databáze: | ScienceDirect |
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